Item ID: 37447

**1 Offered at Best Price**

USHIO SUS 55

Excimer VUV/03 Cleaning Unit
UV Cleaning

Applications:

Enhancement of wetability and adhesion of photoresist

Enhancement of wetability of SOG

Cleaning before deposition process

Soft ashing

High-speed removal of static electricity

Cleaning of reticles
Features:

Simple dry cleaning allows removal of most of organic matter

No charging damage

Instantaneous on/off operation suited to single-wafer process

Low-temperature process

Cleaning process can be performed under atmospheric air

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Location: Scotia, NY

Unit Price	Unstated
Number of Units	1
Manufacturer	USHIO, Inc.
Model	SUS 55
Description	Excimer VUV/03 Cleaning Unit
Lamp Type & Power	Ultra-Violet/ 3 required
Wavelength Maximum	172 nm
Interface	Other
External Cooling	Water Cooled
Other Information	Lamp House Model HO237: Lamp house has vacuum flange attached Flange O.D.: 300 mm Flange I.D.: 170 mm Window size: 170 mm dia. O Ring groove: 240 mm Bolt circle: 270 mm x 8 holes x 12 mm Water cooled Lamp house dimensions: 300W x 404D x 220H mm Power Supply Model B0035B Lamp hour meter Timer External interface connector Cables
Power Requirements	110 V 50/60 Hz 1 Phase
Condition	New-Never Used
Weight	100 lb (45 kg)

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions.
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, 844-833-8347, Fax: 518.381.9578).

Payment:

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions

FULL DESCRIPTION of Item 37447

1 Offered at Best Price

USHIO SUS 55

**1 Offered at Best Price**