(3)CVI Torrmaster TM500 Cryopumps
(2) Interchangeable substrate carousels with flipping option
(3) Telemark Model TT-10 Power Supply (3) Telemark Model TT-10/15 Controller (3) Telemark Model 271 4 Pocket Electron Beam Gun (2) Granville-Phillips Model 316 Vacuum Gauge controller (1) Granville-Phillips Model 370 Stabil-Ion Controller (2) DynaVac Ion Source Controllers Model 8542 (2) Advanced Energy MDX 5K Magnetron Drives Model 3152011-000AC (3) Lakeshore Cryotronics Temperature controllers Model 818 (1) MKS Type 250 Controller (3) Dual Crystal Sensors (1) Polycold Model PFC-550-HC (1) Polycold Model PFC-110-ST |