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Manufacturer
Model
Description
Vacuum System
Vacuum System
Load Lock Included
Number of Cathodes
Target Size
Quantity of DC Cathodes
Quantity of RF Cathodes
Number of RF Etch Cathodes
Gas Inputs
Gas Input Control
Substrate Heaters
Residual Gas Analyzer
DC Power Supply Manufacturer
DC Power Supply Model
DC Power Supply Output Power
RF Generator Manufacturer
RF Generator Model
RF Generator Rated Power Output
RF Generator Frequency
RF Generator Matching Network
Accessories
Other Information
Extended Description
Power Requirements Voltage
Power Requirements Amps
Power Requirements Amps 2
Power Requirements Frequency
Power Requirements Phase
CE Marked
Year of Manufacture
Refurbished
Condition
Exterior Dimensions Width
Exterior Dimensions Depth
Exterior Dimensions Height
Weight