| Unit Price |
Unstated |
| Number of Units |
2 |
| Manufacturer | CTI Cryogenics |
| Model | ON-BOARD 10F--PN 8116103G002 |
| Inlet Flange | ASA
254.0 mm (10.000 in)
|
| Pumping Speed Nitrogen | 9,000.0 l/s (19,071.8 CFM) |
| Pumping Speed Water Vapor | 9,000.00 l/s (19,071.84 CFM) |
| Pumping Speed Argon | 2,500.00 l/s (5,297.73 CFM) |
| Pumping Speed Air | 3,000.00 l/s (6,357.28 CFM) |
| Pumping Capacity--Argon | 2,000.00 l/s (4,238.19 CFM) |
| Pumping Capacity--Hydrogen | 24.00 l/s (50.86 CFM) |
| Accessories | Included with pump:
- Fast Regen Control Ion Implantation
- Roughing pump valve P/N: 811258G001 (Input: 60-80 PSI)
- Purge valve
- Pressure relief valve
|
| Other Information | Pump P/N:8116103G002 |
| Weight | 90 lb (41 kg) |