Unit Price |
Unstated |
Number of Units |
1 |
Manufacturer | Temescal |
Model | BJD-1800 |
Description | E Beam Evaporator, 7" Crucible |
Vacuum System | Cryo Pumped |
Load Lock Included | No |
E Beam Power Supply |  |
Power Supply Type | Triode Tube |
High Voltage Minimum | 8 kV |
Number of Guns Controlled | 1 |
Electron Source Type | Six Pocket |
Crucible Size | 7.00 cc (0.43 cu in) |
Vacuum System | CTI Cryotorr 8 Suitable Cryo Compressor Included. 30 CFM Mechanical Vacuum Pump. (Backing Pump) |
Substrate Heaters | Yes |
Film Thickness Monitor | Yes |
Residual Gas Analyzer | No |
Accessories | Includes Model TP-8- Lift-Off Substrate Fixture. Single dome configured for 4" wafers |
Other Information | 18" in diameter x 9" high stainless steel substrate dome chamber 4" veiw port Airco Temescal VersaVac 2 Thermocouple/Ionization gauge Airco Temescal CV-8A Power Supply Airco Temescal XYS-8 Sweep Control FDC 8000 Film Thickness Monitor
NB: Temescal Auto Sequence Controller shown is not included |
Power Requirements | 208 V
70.0 A
60 Hz
3 Phase
|
Exterior Dimensions |  |
Width | 60.000 in (152.4 cm) |
Depth | 44.000 in (111.8 cm) |
Height | 56.000 in (142.2 cm) |