HIDEN ANALYTICAL ATMOSPHERIC/CHAMBER GAS ANALYSIS SYSTEM
Atmospheric/Chamber Gas Analysis System
Residual Gas Analyzers (RGAs) are specialized instruments designed to identify and quantify gas compounds within a specified environment, typically using mass spectrometry techniques. They provide precise measurements with exceptional sensitivity, operating within a dynamic range that supports detection of various gases at pressures as low as 10^-11 Torr, ensuring high measurement repeatability and traceability.
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