Capacitance Gauges
Capacitance gauges are precision instruments used to measure pressure based on capacitance changes. These devices offer high resolution and stability, supporting measurement capabilities up to 1000 Torr with documented calibration and traceability.
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MKS INSTRUMENTS INC. BARATRON CAPACITANCE GAUGE
Baratron Capacitance Gauge MKS Instruments Inc. 626
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MKS INSTRUMENTS INC. BARATRON PRESSURE TRANSDUCER 10 TORR
10 Torr Pressure Transducer
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MKS INSTRUMENTS PRESSURE SWITCH 100 TORR
Pressure Switch with Trip Point of 40 Torr
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MKS INSTRUMENTS INC. BARATRON CAPACITANCE VACUUM GAUGE, 1000 TORR
Capacitance Gauge
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MKS INSTRUMENTS DIGITAL MANOMETER 10 TORR
Digital Capactiance Manometer with DeviceNet
Can only be used with Axcelis systems
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Common Applications
Semiconductor manufacturing
Vacuum chambers
Laboratory testing
Quality control
Research and development
Industrial processes
Frequently Asked Questions
What is the operational pressure range of capacitance gauges?
Capacitance gauges typically operate within a range of 1 Torr to 1000 Torr, providing high precision across this spectrum.
How do capacitance gauges ensure measurement accuracy?
These gauges utilize changes in capacitance to measure pressure accurately, with frequent calibration ensuring traceability and reliability.
Can capacitance gauges be used in high vacuum conditions?
Yes, capacitance gauges are suitable for high vacuum conditions, performing consistently even under low pressure environments.
What industries benefit most from using capacitance gauges?
Industries like semiconductor manufacturing, research laboratories, and quality control sectors rely heavily on capacitance gauges for precise pressure measurements.
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