Automatic Wafer Inspection Tools
KLA 2367 "Escape" Bright Field Inspection Tool
BrightField Inspektionstool 25 cassette HW 200mmGEM/SECS and HSMS ModelEnable .12 , .62, .39 Picels
ORS Upgrade done
Tool currently full installed at cleanroom (estimated time depending on areaneed)
Sister tool available!