Other Lithography Equipment

Other lithography equipment encompasses a range of advanced tools critical for semiconductor manufacturing, providing precision alignment and patterning. These instruments offer high accuracy and repeatability, necessary for maintaining tight process control and achieving sub-micron resolutions in wafer fabrication.

  1. ASML-AT1250 DUV193nm

    Other Lithography Equipment

    ASML-AT1250 DUV193nm

    Equipment according the age in good in good shape,

    however only one wafer stage is currently working 

    2003: "ASML's new generation TWINSCAN system patterns for 65 nm node"

    Equipment inspection virtual or physical possible

  3. TEL ACT8-D -Track

    Other Lithography Equipment

    TEL ACT8-D -Track

    AC Power Box, T/C Unit, T/H Controller 1+2, Chemical Cabinet, 4 Coater and 4 Developer

    Last Time in production: 5/5/25

  5. TEL ACT12 Track 12 Zoll

    Other Lithography Equipment

    TEL ACT12 Track 12 Zoll

    two process blocks ACT 12 PIQ with 16 HCH Plates, 4 PCT´s 2 DEV Units, 1 WEE

    last time in production: 07.08.2024

  6. CANON 5500iZ - Stepper

    Other Lithography Equipment

    CANON 5500iZ - Stepper

    '- 12" Standard Wafer Chuck and 12" wafer handling system - SMIF type reticle loading ports and reticle changer unit- Pellicle Particle checker installed

    - Hg-lamp will be rmoved prior shipping- Coolant will be removed prior shipping- all batteries will be removed prior shipping

Common Applications

Semiconductor Fabrication

Precision Wafer Alignment

Lithographic Patterning

Sub-Micron Resolution Processes

Buying Guide

Other Lithography Equipment Buying Guide

When selecting lithography equipment, it is essential to consider the specific needs of your semiconductor manufacturing process.

Different types of equipment, such as wafer aligners and track systems, play unique roles in wafer fabrication.

  • Verify alignment accuracy and resolution specifications to ensure precise pattern transfer.
  • Consider equipment compatibility with existing wafer handling and processing systems.
  • Ensure repeatability and stability to maintain production consistency over time.
  • Review any technical support and maintenance options available to minimize downtime.

Frequently Asked Questions

What types of lithography equipment are available?
Available types include wafer aligners, track systems, and wafer handling systems essential for semiconductor production.
What is the significance of precision alignment in lithography?
Precision alignment ensures patterns are accurately transferred onto wafers, crucial for maintaining resolution and achieving desired semiconductor specifications.
How does a wafer aligner function?
A wafer aligner accurately positions wafers for subsequent processing steps, ensuring proper exposure and pattern alignment in semiconductor manufacturing.
What specifications should be considered when choosing lithography equipment?
Key specifications include alignment accuracy, resolution, repeatability, and compatibility with wafer sizes and handling systems.