Vertical Diffusion Furnaces

Vertical diffusion furnaces are specialized ovens used in semiconductor manufacturing to create precise thermal environments for processes like oxidation and doping. These furnaces offer capabilities such as low-pressure operation and atmospheric control, essential for achieving uniformity and precision in processes, typically within operating temperature ranges up to 1200°C.

  2. ASM Furnace Vertical OFENV07C

    Vertical Diffusion Furnaces

    ASM Furnace Vertical OFENV07C

    ASM Furnace Vertical 

    2 Reactor atmospheric

    Reactor 1 is missing heater cassette, Motor driver, Board and loader arm

Common Applications

oxidation processes

doping in semiconductors

annealing

semiconductor manufacturing

Buying Guide

Vertical Diffusion Furnaces Buying Guide

When selecting a vertical diffusion furnace, consider the type of semiconductor processes you need to perform and the specific thermal and atmospheric requirements. Verify the furnace's temperature range to ensure it meets your processing needs.

Ensure the furnace supports the desired atmospheric conditions, whether low-pressure or specific gas mixtures. Check for the precision of temperature control to maintain uniformity in processing.

  • Confirm the maximum operating temperature and uniformity specifications.
  • Evaluate the furnace's capability to operate under low-pressure conditions if needed.
  • Assess the control systems for precision in temperature and atmosphere.
  • Check compatibility with your existing semiconductor manufacturing setup.

Frequently Asked Questions

What is a vertical diffusion furnace used for?
Vertical diffusion furnaces are used in semiconductor manufacturing for processes like oxidation, annealing, and doping where precise thermal and atmospheric conditions are required.
What are the typical operating temperatures for vertical diffusion furnaces?
These furnaces typically operate at temperatures up to 1200°C, providing the necessary thermal environment for semiconductor processes.
Can vertical diffusion furnaces operate under low pressure?
Yes, many vertical diffusion furnaces are designed to operate under low-pressure conditions to facilitate specific semiconductor processing requirements.
What atmospheric controls are available in vertical diffusion furnaces?
These furnaces often feature atmospheric control mechanisms, allowing for tailored processing environments such as inert gas atmospheres necessary for precise manufacturing outcomes.