Load locked single wafer sputter, cassette to cassette vertically mounted for sideways sputter Currently configured for 100mm wafers3 Target mini-quantumsRF EtchVIPS (Vacuum Isolated Processing Station)Residual Gas Analyzer
Vacuum Chamber A great core system for a custom project System sold AS IS
Turbo PumpStainless steel body type
Pump will be rebuilt once sold
Turbo Pump Turbomolecular pump will be rebuilt to factory specifications.
Diffusion Pump Pump will be rebuilt at time of sale. Specify desired heater voltage (120/208/240VAC).
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